OXFORD INSTRUMENTS
HKL ELECTRON BACKSCATTERED DIFFRACTION SYSTEMS (EBSD)

EBSD has become a well-established technique for microstructural characterisation in the SEM or FIB. The crystallographic data obtained can be used in the measurement of crystal orientation, misorientation, grain size distribution, texture, strain analysis, recrystallised / deformed fractions and grain boundary characterisation. The technique is used in a broad span of applications in metals & materials analysis / processing, microelectronics and earth sciences.

Microstructural EBSD measurements of phase and orientation rely on detecting and analysing electron backscatter (Kikuchi) patterns (or EBSPs) generated in the Scanning Electron Microscope (SEM) from a polycrystalline sample. This information can be acquired simultaneously with EDS data to reveal both sample chemistry and crystal structure on a micro / nano-scale.

Click Here for a brief video demonstration of how EBSD works using Oxford Instruments AZtec HKL.

For more information on EBSD as a technique, visit Oxford Instruments' educational website www.ebsd.com.

HARDWARE

Oxford Instruments HKL offer a range of EBSD detectors to suit every application:

• Nordlys Nano – For the best sensitivity and highest resolution
• Nordlys Max3 - Collect, index and display data in real-time at 1580 points per second

SOFTWARE

AZtec integrates AZtecHKL acquisition and analysis software with the Nordlys EBSD detectors to create a powerful and versatile solution for EBSD.

Capabilities:

• Unleashes the potential of the latest generation of EBSD detectors, NordlysMax3 (optimised for high-speed) and NordlysNano (optimised for sensitivity)
• Seamless, simultaneous EBSD and EDS acquisition with AZtec Synergy
• Transmission Kikuchi Diffraction (TKD or sometimes referred to as t-EBSD) capability as standard
• EBSD in 3 Dimensions – FIB integration for 3 dimensional EBSD analysis
• EBSD Post processing using Channel5 – extensive data acquisition and post processing software including orientation mapping, pole and inverse pole figures, ODF and MODF calculation and display, phase creation

Contact us for more technical details and application notes.

Visit www.ebsd.com Oxford Instrument’s educational website dedicated to the principles and practice of EBSD

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